Can I use a pyrometer to measure susceptor and platen temperature in a PVD sputtering system?

Yes. Graphite and silicon carbide susceptors and platens are among the most common measurement targets in PVD systems. Their emissivity is typically higher and more stable than bare silicon wafers, which makes 1-color pyrometry viable in many cases. The PSC-S44N/G44N (100°C–2500°C) and PSC-SR55/S55 (200°C–3000°C) series are well-suited for susceptor and platen measurement. For systems in which the susceptor emissivity changes over its lifetime, the 2-color variant provides long-term stability without recalibration.