How do I measure temperature in a CVD or MOCVD chamber without contact?

Non-contact infrared pyrometry is the standard method for measuring chamber temperature in CVD and MOCVD chambers. The pyrometer is mounted outside the chamber and sights through a viewport or fiber optic feedthrough. For MOCVD, a 2-color ratio pyrometer is strongly preferred -precursor gas flows and depositing films change the effective emissivity of the susceptor and wafer surface continuously during the process. The PSC-SR10N/S10N series and the PSC-M311/M322 are both well-suited depending on your access constraints and required accuracy.